Download e-book for iPad: Chemical Mechanical Polishing in Silicon Processing: Vol 63 by Shin M. Hwa Li,Robert M. Miller

By Shin M. Hwa Li,Robert M. Miller

because its inception in 1966, the sequence of numbered volumes often called Semiconductors and Semimetals has individual itself during the cautious collection of recognized authors, editors, and members. The Willardson and Beer sequence, because it is well known, has succeeded in generating various landmark volumes and chapters. not just did a lot of those volumes make an effect on the time in their ebook, yet they remain well-cited years after their unique unlock. lately, Professor Eicke R. Weber of the collage of California at Berkeley joined as a co-editor of the sequence. Professor Weber, a well known specialist within the box of semiconductor fabrics, will extra give a contribution to carrying on with the sequence' culture of publishing well timed, hugely proper, and long-impacting volumes. the various contemporary volumes, akin to Hydrogen in Semiconductors, Imperfections in III/V fabrics, Epitaxial Microstructures, High-Speed Heterostructure units, Oxygen in Silicon, and others promise that this practice might be maintained or even expanded.
Reflecting the really interdisciplinary nature of the sphere that the sequence covers, the volumes in Semiconductors and Semimetals were and may remain of significant curiosity to physicists, chemists, fabrics scientists, and machine engineers in sleek industry.

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Chemical Mechanical Polishing in Silicon Processing: Vol 63 (Semiconductors and Semimetals) by Shin M. Hwa Li,Robert M. Miller


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